30-05-2013, 02:46 PM
APPLICATIONS OF MEMS DEVICES IN NANOSATELLITE
APPLICATIONS OF MEMS.pptx (Size: 1.07 MB / Downloads: 33)
MEMS
Micro(small)
Electro(electric components/functionality)
Mechanical(mechanical components)
Systems(integrated, system-like functionality)
MEMS fabrication
IC Fabrication
Bulk Micromachining and Wafer Bonding
Micromolding
Surface Micromachining
MEMS Applications:-
Pressure Sensors
Accelerometers
Inertial Sensors
Micro gryoscope
Future Aspect
Future MEMS products will demand higher levels of electrical-mechanical integration and more intimate interaction.
MEMS devices will be made more accurate and with high performance.
Nanoelectromechanical systems (NEMS) will be the next step.