12-04-2012, 04:58 PM
CMOS-MEMS Inertial Sensors and Their Applications
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Introduction
MEMS and CMOS-MEMS Technologies
Thin-Film CMOS-MEMS
DRIE CMOS-MEMS
Process Development and Improvement
Integrated CMOS-MEMS Inertial Sensors
MEMS Inertial Sensors: Applications
3-Axis Accelerometer
Design, Fabrication and Characterization
Integrated Gyroscope Introduction
Design and Fabrication
CMOS-MEMS Technologies
Full CMOS compatibility
Low cost through mainstream CMOS foundries, no assembling
High integration, high overall performance
Multi-functional devices
Technological Approaches
Pre-CMOS (Sandia)
Intra-CMOS (iMEMS®, ADI)
Post-CMOS (No foundry limit)
• Additional layers to CMOS
– Post-CMOS refractory metal/Poly Si deposition (not traditional
CMOS process- no metallization )
– Post-CMOS SiGe/Ge deposition
Applications: Everywhere in modern life
Vehicle safety
Seismetic and Engineering monitoring
Health/Athletic monitoring
Virtual reality, image stabilization
Logistic, transportation
Consume electronics (PC, Playstation)
Portable electronics (MP3, cell phone, etc.)