09-10-2014, 10:20 AM
Abstracts: A new valve less micro piezoelectric micro pump has been designed and fabricated. The pump with a check valve has a risk of reduction in performance and reliability due to wear and fatigue. Instead of passive check valves the pump uses two specially designed nozzle/diffuser elements which give a fluid directing effect. Diffuser/Nozzle element is connected to a chamber with an oscillating diaphragm. The vibrating diaphragm produces an oscillating chamber volume, which together with the diffuser/nozzle elements creates a one-way fluid flow. A micro pump prototype with a rectangular chamber and conical diffuser nozzle elements has fabricated. A piezoelectric stack is prepared which is used as the actuating element.