05-04-2012, 11:29 AM
Laser Acceleration Experimentsat ORION
Laser Acceleration Experiments at ORION.PPT (Size: 3.86 MB / Downloads: 61)
hotonics Trend: Custom Optical Media
Photonic Crystals allow for tailoring optical properties to specific applications:
Nonlinearity: Spectroscopy, wavelength conversion in telecom
Dispersion: Telecom signal processing
Large mode area: High power applications such as lithography and materials processing
Custom optics require manufacturing techniques that can meet tight tolerances
Fabrication Trend: Small Feature Size
The integrated circuit industry drives development of ever-smaller feature size capability and tolerance
DUV, X-ray and e-beam lithography
High-aspect-ratio etching using high-density plasma systems
Critical Feature size control → 0.5 nm (l/200) RMS by 2010 (’01 ITRS)