18-05-2012, 11:51 AM
SMART DUST
smart dust.ppt (Size: 801 KB / Downloads: 39)
About SMARTDUST
Smartdust is the term used to describe a network of tiny wireless microelectromechanical systems (MEMS) sensors, robots, or devices, installed with wireless communications, that can detect (for example) light, temperature, or vibration.
Micro electromechanical systems
MEMS is the integration of mechanical elements, sensors, actuators, and electronics onto a common silicon base through the use of micro fabrication technology.
This technology has expanded from the conventional two-dimensional design of chips to three-dimensional structures.
Components of MEMS
It receives data, processes it, and makes decisions.
The data received comes from the micro sensors in the MEMS
Micro sensors:
These constantly gather data from the surrounding environment and pass this information on to the microelectronics for processing.
These sensors can monitor mechanical, thermal, biological, chemical, optical and magnetic readings from the surrounding environment.
Surface micro machining
It is based on deposition and etching of different structural layers.
A substrate is chosen and layers are grown on the top of the substrate.
Sacrificial layers are selectively etched by photolithography involving wet etching or dry etching processes.