31-07-2014, 12:45 PM
multifunctional environmental sensors
[attachment=66419]
introduction
Multifunctional integrated sensors (M-FISes) chip comprises ten sensors on a 10 10 mm die
Measures :
Temperature
Humidity
Light intensity
Pressure
Air speed
Air flow direction
Magnetic field
Acceleration in three axes
Sensors measure each parameter using various transduction principles
INTEGRATED FABRICATION PROCESS DESIGN
Two goals :
To integrate the sensor
functions required for a generically useful environmental sensor
2. To minimize the complexity of the fabrication
process to demonstrate the potential for low-cost mass production.
DESIGN AND CALIBRATION
Devices fabricated on a 10mm
Each sensor was tested individually keeping other measurement parameters constant
Tested for cross-sensitivity
Sensor tests performed in 25 & approximately 35 % relative humidity
ANEMOMETER
Air speed and direction sensors consists of two hot wire anemometers perpendicular to each other
Anemometers are placed in the fluid flow
Transduce fluid velocity from a change of resistance of wire
CONCLUSION
M-FIS es has capability of monitoring ten different parameters at once
Integrated fabrication process optimizes the number of sensor functions and performance
Minimizes complexity, cost ,size, power
Stable operation of each sensor achieved with the die exposed to ambient conditions
Cross-sensitivities can be compensated with measurement data from complementary sensors
[attachment=66419]
introduction
Multifunctional integrated sensors (M-FISes) chip comprises ten sensors on a 10 10 mm die
Measures :
Temperature
Humidity
Light intensity
Pressure
Air speed
Air flow direction
Magnetic field
Acceleration in three axes
Sensors measure each parameter using various transduction principles
INTEGRATED FABRICATION PROCESS DESIGN
Two goals :
To integrate the sensor
functions required for a generically useful environmental sensor
2. To minimize the complexity of the fabrication
process to demonstrate the potential for low-cost mass production.
DESIGN AND CALIBRATION
Devices fabricated on a 10mm
Each sensor was tested individually keeping other measurement parameters constant
Tested for cross-sensitivity
Sensor tests performed in 25 & approximately 35 % relative humidity
ANEMOMETER
Air speed and direction sensors consists of two hot wire anemometers perpendicular to each other
Anemometers are placed in the fluid flow
Transduce fluid velocity from a change of resistance of wire
CONCLUSION
M-FIS es has capability of monitoring ten different parameters at once
Integrated fabrication process optimizes the number of sensor functions and performance
Minimizes complexity, cost ,size, power
Stable operation of each sensor achieved with the die exposed to ambient conditions
Cross-sensitivities can be compensated with measurement data from complementary sensors