17-04-2012, 01:01 PM
MEMS and NEMS
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Introduction:
Micro-ElectroMechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) rely on technologies of miniaturization. Watch makers have practiced the art of miniaturization since the 13th century. With the invention of the compound microscope in the 1600’s and later use to observe microbes, plant and animal cells and modern day, atomic force and electron microscopes that allow for observation at the molecular and atomic scale, there has been an interest to manipulate matter at a smaller and smaller scale. One success story has been the miniaturization of the modern era’s transistor which has allowed for the development of ever smaller and more powerful gadgets and machines. The transistor in today’s integrated circuits has a size of 0.18 micron in production and approaches 10 nanometers in research laboratories.
Definition and Terms:
Unlike the European term MST, the U.S. term MEMS applies to systems which include a moving part and some form of electronics.
Alternately, MEMS, also known as Microelectronic Mechanical Systems, can be described as the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through micro fabrication technology. While the electronics portion is manufactured using integrated circuits (IC) process sequences, the micro mechanical components are fabricated using compatible “micromachining” processes that selectively etch away parts of silicon wafer or add new structural layers to form the mechanical and electromechanical device.
The broadest requirement for these very small devices is ability to sense the environment, to collect necessary data and to create a signal or action to make desired changes to the environment.
Microstructure Fabrication:
Traditionally MEMS have relied upon silicon and silicon based materials, though other materials like silicon dioxide, silicon nitride, and silicon on insulators (SOI), gallium arsenide, quartz, glass, and diamond have also been explored. Silicon, polysilicon, and amorphous silicon are the most common materials currently used in MEMS commercial production.
In silicon-based MEMS processing, many of the features of integrated circuit processing along with micromachining techniques are used. Silicon has very valuable properties which lend itself well to micromachining. Because of its natural abundance and versatility, it is also an economically desirable element in commercial applications.
Current Applications, Continued
Hand held detectors – biological & chemical microsensors
Chem’s Lab on a Chip (security applications)
Micro and Radio Frequency (RF) Switches
RFID Technologies
Modern “bar-coding” system increasingly used on toll roads and materials handling applications
Data Storage Systems
IBM Millipede storage system – AFM tip writes data bit by melting a depression into polymer mediaum and reads data by sensing depressions
Impact of Miniaturization:
The impact of MEMS and NEMS on our future lives will be tremendous. These emerging technologies open up entirely new job opportunities both in semiconductor and biological applications. MEMS and nano manufacturing is a logical transition from today’s semiconducting manufacturing methods and will lead to numerous teaching and manufacturing jobs. The biological and optical applications of MEMS and NEMS will open up applications, development, and research. There is an incentive for research in several universities and many government and privately-funded initiatives are in place to create better products with nanotechnology. MEMS and NEMS will likely greatly improve the construction and transportation industries as vehicles and building materials become lighter, stronger and more durable and incorporate greater fuel efficiencies.
Challenges and Possibilities
Fundamental and applied research
Engineering and technological developments
High Fidelity Modeling
High Yield / Low Cost Fabrication
“Molecular manufacturing”
[attachment=20220]
Introduction:
Micro-ElectroMechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) rely on technologies of miniaturization. Watch makers have practiced the art of miniaturization since the 13th century. With the invention of the compound microscope in the 1600’s and later use to observe microbes, plant and animal cells and modern day, atomic force and electron microscopes that allow for observation at the molecular and atomic scale, there has been an interest to manipulate matter at a smaller and smaller scale. One success story has been the miniaturization of the modern era’s transistor which has allowed for the development of ever smaller and more powerful gadgets and machines. The transistor in today’s integrated circuits has a size of 0.18 micron in production and approaches 10 nanometers in research laboratories.
Definition and Terms:
Unlike the European term MST, the U.S. term MEMS applies to systems which include a moving part and some form of electronics.
Alternately, MEMS, also known as Microelectronic Mechanical Systems, can be described as the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through micro fabrication technology. While the electronics portion is manufactured using integrated circuits (IC) process sequences, the micro mechanical components are fabricated using compatible “micromachining” processes that selectively etch away parts of silicon wafer or add new structural layers to form the mechanical and electromechanical device.
The broadest requirement for these very small devices is ability to sense the environment, to collect necessary data and to create a signal or action to make desired changes to the environment.
Microstructure Fabrication:
Traditionally MEMS have relied upon silicon and silicon based materials, though other materials like silicon dioxide, silicon nitride, and silicon on insulators (SOI), gallium arsenide, quartz, glass, and diamond have also been explored. Silicon, polysilicon, and amorphous silicon are the most common materials currently used in MEMS commercial production.
In silicon-based MEMS processing, many of the features of integrated circuit processing along with micromachining techniques are used. Silicon has very valuable properties which lend itself well to micromachining. Because of its natural abundance and versatility, it is also an economically desirable element in commercial applications.
Current Applications, Continued
Hand held detectors – biological & chemical microsensors
Chem’s Lab on a Chip (security applications)
Micro and Radio Frequency (RF) Switches
RFID Technologies
Modern “bar-coding” system increasingly used on toll roads and materials handling applications
Data Storage Systems
IBM Millipede storage system – AFM tip writes data bit by melting a depression into polymer mediaum and reads data by sensing depressions
Impact of Miniaturization:
The impact of MEMS and NEMS on our future lives will be tremendous. These emerging technologies open up entirely new job opportunities both in semiconductor and biological applications. MEMS and nano manufacturing is a logical transition from today’s semiconducting manufacturing methods and will lead to numerous teaching and manufacturing jobs. The biological and optical applications of MEMS and NEMS will open up applications, development, and research. There is an incentive for research in several universities and many government and privately-funded initiatives are in place to create better products with nanotechnology. MEMS and NEMS will likely greatly improve the construction and transportation industries as vehicles and building materials become lighter, stronger and more durable and incorporate greater fuel efficiencies.
Challenges and Possibilities
Fundamental and applied research
Engineering and technological developments
High Fidelity Modeling
High Yield / Low Cost Fabrication
“Molecular manufacturing”