28-06-2012, 02:42 PM
Discovering new eFUSE technology in the Intel Westmere 32nm CPU
[attachment=25957]
Unique eFUSE in Intel Westmere CPU
• eFUSE technology in the Intel Westmere 32nm
processor is an industry first
• First analysis of eFUSE implementation used in a high-k
metal gate device by UBM TechInsights
• eFUSE block is a new type of 3D structure
• Voltage (V) is ramped up to activate the fuse and short the
device
• Traditional eFUSE technology uses silicided
polysilicon lines
• Silicide migration on the poly lines to create high resistance
poly from previously conductive lines
[attachment=25957]
Unique eFUSE in Intel Westmere CPU
• eFUSE technology in the Intel Westmere 32nm
processor is an industry first
• First analysis of eFUSE implementation used in a high-k
metal gate device by UBM TechInsights
• eFUSE block is a new type of 3D structure
• Voltage (V) is ramped up to activate the fuse and short the
device
• Traditional eFUSE technology uses silicided
polysilicon lines
• Silicide migration on the poly lines to create high resistance
poly from previously conductive lines