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the nanobot system

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Installation


Mounting on the door assembly leaves the
SEM stage free for other tasks.
The NanoBot can also be stage mounted.
Up to four independent XYZ nanopositioners
can be used.
The user can easily install and remove the
NanoBot.


Inertial Drive Principle


The driven mass moves forward with the
advancing bearing due to static friction.
The piezo then contracts quickly,
exceeding the static friction limit, thus
allowing the bearing to slide with
respect to the driven mass.


Actuation Modes


The piezo expands and contracts
according to a sawtooth pattern.
The resulting net forward motion
enables the NanoBot’s Multi Step
Mode. The direction of Multi Step
travel is changed by reversing the
sawtooth pattern.
Using just one sawtooth moves the
driven mass forward (or backward)
one step, enabling the NanoBot’s
Single Step Mode.
Slow expansion and contraction of
the piezo causes the driven mass to
move with it, remaining attached by
static friction. This enables the
NanoBot’s Fine Motion Mode.


CONCLUSIONS

1. The NanoBot nanomanipulator is an easy-to-operate,
highly versatile, user-programmable system for use in
SEMs and FIB tools.
2. The NanoBot System transforms a SEM or FIB tool into a
true nanofabrication / nanomaterial testing environment.
3. Specialized end effectors enable mechanical and electrical
probing, TEM sample preparation, force sensing, gripping,
nanomaterial testing, and multi-gas delivery for EBID/EBIE.
4. Integration with LabVIEW™ enables exceptional ease of
use and also allows the user to create custom software
applications.
NANODEVICES