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Applications of MEMS

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Pressure Sensors

A pressure sensor can be used to sense the absolute air pressure within the intake manifold of an automobile engine, so that the amount of fuel required for each engine cylinder can be
computed.

Accelerometers

Accelerometers are acceleration sensors. An inertial mass suspended by springs is acted upon by acceleration forces that cause the mass to be deflected from its initial position.

Some other Applications:

Inkjet printers, which use piezoelectrics or thermal bubble ejection to deposit ink on paper.
Accelerometers in modern cars for a large number of purposes including airbag deployment in collisions.
MEMS gyroscopes used in modern cars and other applications to detect yaw; e.g., to deploy a roll over bar or trigger dynamic stability control[16]
MEMS microphones in portable devices, e.g., mobile phones, head sets and laptops.
Silicon pressure sensors e.g., car tire pressure sensors, and disposable blood pressure sensors
Optical switching technology, which is used for switching technology and alignment for data communications
Fluid acceleration such as for micro-cooling

MEMS Products under Development

Several interesting new products and applications are being developed using MEMS.
MEMS - piezoelectric generator being developed for self contained wireless sensors
Computer game controller using MEMS accelerometer.
Programmable MEMS gyroscope with features that significantly lower the cost of integrating the gyroscope into industrial equipment.
MEMS microphones that are smaller and more resistant to heat than conventional microphones.
MEMS RF switches to reduce power losses in microwave applications.
MEMS blood pressure sensor with wireless data transfer that can be implanted in patients.

Conclusion:

Future MEMS applications will be driven by processes enabling greater functionality through higher levels of electronic-mechanical integration and greater numbers of mechanical components working alone or together to enable a complex action.