01-07-2013, 02:40 PM
APPLICATION OF MEMS/NEMS DEVICES
[attachment=56278]
INTRODUCTION
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology.
Most MEMS devices have at least one transducer element.
To sense
To actuate
Transducer is a device or system that converts one form of energy to another – force to voltage, voltage to force, …
MEMS/NEMS Vs. IC
MEMS act as transducers (sensors) converting a physical property into an electrical property. MEMS can also actuate mechanical devices (switches, mirrors, etc…)
IC’s can sense electrons and move them about, amplify, attenuate etc.
IC’s and MEMS can be integrated on one chip if the processes are compatible.
GYROSCOPE
This device employs vibrating mechanical element to sense rotation.
The device consist of oscillating mass.
A dual axis gyroscope can be used to sense angular rotation
Sensor used in advance gravity sensing mobile phone.
NANOELECTRO MECHANICAL SYSTEM
Unlike their micro scale counterparts they have critical structural dimensions below 100 nm.
Useful where very small mass and /or very large surface to area ratio required.
Such as , force sensor, chemical sensor , biological sensors and ultra high frequency resonators.
Cantilever Sensors
As mass is added to the cantilever shifts the resonance frequency.
A gold dot, about 50 nanometers in diameter, fused to the end of a cantilevered oscillator about 4 micrometers long. A one-molecule-thick layer of a sulfur-containing chemical deposited on the gold adds a mass of about 6 attograms, which is more than enough to measure.
SUMMARY
Nano-systems have the enabling capability and potential similar to those of nano-processors .
Since NEMS is a nascent and synergistic technology, many new applications will emerge, expanding the markets beyond that which is currently identified or known.
NEMS is forecasted to have growth similar to its parent IC technology.
[attachment=56278]
INTRODUCTION
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology.
Most MEMS devices have at least one transducer element.
To sense
To actuate
Transducer is a device or system that converts one form of energy to another – force to voltage, voltage to force, …
MEMS/NEMS Vs. IC
MEMS act as transducers (sensors) converting a physical property into an electrical property. MEMS can also actuate mechanical devices (switches, mirrors, etc…)
IC’s can sense electrons and move them about, amplify, attenuate etc.
IC’s and MEMS can be integrated on one chip if the processes are compatible.
GYROSCOPE
This device employs vibrating mechanical element to sense rotation.
The device consist of oscillating mass.
A dual axis gyroscope can be used to sense angular rotation
Sensor used in advance gravity sensing mobile phone.
NANOELECTRO MECHANICAL SYSTEM
Unlike their micro scale counterparts they have critical structural dimensions below 100 nm.
Useful where very small mass and /or very large surface to area ratio required.
Such as , force sensor, chemical sensor , biological sensors and ultra high frequency resonators.
Cantilever Sensors
As mass is added to the cantilever shifts the resonance frequency.
A gold dot, about 50 nanometers in diameter, fused to the end of a cantilevered oscillator about 4 micrometers long. A one-molecule-thick layer of a sulfur-containing chemical deposited on the gold adds a mass of about 6 attograms, which is more than enough to measure.
SUMMARY
Nano-systems have the enabling capability and potential similar to those of nano-processors .
Since NEMS is a nascent and synergistic technology, many new applications will emerge, expanding the markets beyond that which is currently identified or known.
NEMS is forecasted to have growth similar to its parent IC technology.