25-08-2017, 09:32 PM
Abstract—This study proposes a novel technology using nanoparticle
fluid electromagnetism to control the direct hot
imprint resist of nickel mold. combining the present gasassisted
nanoparticle hot imprint molding technology,
electroforming technology, and self-designed heatable
electromagnetic plate for even control and progressive
pressuring technology, this study used electromagnetic nickel
mold direct hot imprint to replicate micro structures, in order
to make the molding technology and application of micro
nanoimprint more mature. This study first used gas-assisted
nanoparticle hot embossing method to replicate structures of
microlens of original silicon molds on PC, so as to obtain
complementary structural patterns. This PC film with
structures of microlens is cast into nickel molds by
electroforming. This nickel mold was used as the mold for
magnetic embossing to imprint hot plastic PMMA.The result
showed that through gas-assisted nanoparticle hot embossing
molding, casting and component magnetic PDMS soft mold
casting, molds of high costs and complicated production
process can be massively replicated, and the replication
precision is good. Hot gas embossing PDMS film and the
surface of base materials can achieve even pressure and
conformal contact, thus significantly improving the effective
imprint area and imprintability. Through electroforming,
casting duration of magnetic nickel molds can be shortened
and costs can be effectively lowered. Moreover,
electromagnetic plate was used to evenly control the direct hot
pressure imprint resist, which is an advantage of the
production process of micro structures.
Keywords- Gas-assisted nanoparticle hot embossing;
Electroforming; Electromagnetism controlled imprint; magnetic
nickel mold imprint; Component casting
I. INTRODUCTION
Since the electro-optic technology is developing vigorously,
the design of electronic products is becoming more compact,
such as DVD players and digital cameras. In order to
achieve smaller size and lighter weight, micro elements
need to be developed, such as microlens arrays and
diffractive optical elements. Microlens arrays are among the
most widely used optical components, which are used in
display components[1], optical sensors[2], and optical fiber
communication. Conventional production technologies can
no longer meet the demand for producing precise micro
elements, thus, a replication molding technology for mass
production of precise micro components is urgently needed.
At present, micro structure mass production
technologies mainly include micro imprint molding and
micro injection molding. Mold designing of micro injection
molding is complicated, involves high costs, and large size
optical film that is difficult for production, hence mass
production of display components is limited. Micro hot
embossing molding technology is further developed into
Nanoimprint [3-4]. Using the imprint concept as its
principle, a mold with nanostructure is pressurized so as to
let the mold contact a formed material base panel, and then
allow such formed material produces a nanostructure pattern
that can replace each other with that mold.
This study first used gas-assisted nanoparticle hot
embossing molding technology [5] to replicate the structures
of microlens of the original silicon molds onto PC film to
obtain complementary structural patterns. This PC film with
micro structure was used to replicate nickel mold through
electroforming. PMMA resist was directly imprinted for
molding. Magnetic imprint control can overcome the
shortcomings of uneven solid print pressure, and inability of
gas pressure imprint for partial control. Another advantage
of this technology is open imprint technology and
equipment. Finally, this study discussed the replication of
structures of microlens using this novel technology.
fluid electromagnetism to control the direct hot
imprint resist of nickel mold. combining the present gasassisted
nanoparticle hot imprint molding technology,
electroforming technology, and self-designed heatable
electromagnetic plate for even control and progressive
pressuring technology, this study used electromagnetic nickel
mold direct hot imprint to replicate micro structures, in order
to make the molding technology and application of micro
nanoimprint more mature. This study first used gas-assisted
nanoparticle hot embossing method to replicate structures of
microlens of original silicon molds on PC, so as to obtain
complementary structural patterns. This PC film with
structures of microlens is cast into nickel molds by
electroforming. This nickel mold was used as the mold for
magnetic embossing to imprint hot plastic PMMA.The result
showed that through gas-assisted nanoparticle hot embossing
molding, casting and component magnetic PDMS soft mold
casting, molds of high costs and complicated production
process can be massively replicated, and the replication
precision is good. Hot gas embossing PDMS film and the
surface of base materials can achieve even pressure and
conformal contact, thus significantly improving the effective
imprint area and imprintability. Through electroforming,
casting duration of magnetic nickel molds can be shortened
and costs can be effectively lowered. Moreover,
electromagnetic plate was used to evenly control the direct hot
pressure imprint resist, which is an advantage of the
production process of micro structures.
Keywords- Gas-assisted nanoparticle hot embossing;
Electroforming; Electromagnetism controlled imprint; magnetic
nickel mold imprint; Component casting
I. INTRODUCTION
Since the electro-optic technology is developing vigorously,
the design of electronic products is becoming more compact,
such as DVD players and digital cameras. In order to
achieve smaller size and lighter weight, micro elements
need to be developed, such as microlens arrays and
diffractive optical elements. Microlens arrays are among the
most widely used optical components, which are used in
display components[1], optical sensors[2], and optical fiber
communication. Conventional production technologies can
no longer meet the demand for producing precise micro
elements, thus, a replication molding technology for mass
production of precise micro components is urgently needed.
At present, micro structure mass production
technologies mainly include micro imprint molding and
micro injection molding. Mold designing of micro injection
molding is complicated, involves high costs, and large size
optical film that is difficult for production, hence mass
production of display components is limited. Micro hot
embossing molding technology is further developed into
Nanoimprint [3-4]. Using the imprint concept as its
principle, a mold with nanostructure is pressurized so as to
let the mold contact a formed material base panel, and then
allow such formed material produces a nanostructure pattern
that can replace each other with that mold.
This study first used gas-assisted nanoparticle hot
embossing molding technology [5] to replicate the structures
of microlens of the original silicon molds onto PC film to
obtain complementary structural patterns. This PC film with
micro structure was used to replicate nickel mold through
electroforming. PMMA resist was directly imprinted for
molding. Magnetic imprint control can overcome the
shortcomings of uneven solid print pressure, and inability of
gas pressure imprint for partial control. Another advantage
of this technology is open imprint technology and
equipment. Finally, this study discussed the replication of
structures of microlens using this novel technology.