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Scaling of MOSFETs

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Introduction to MOSFET scaling

The lateral geometric dimensions of devices and interconnects are
reduced. This reduction in size is referred to as “scaling” of the geometric
dimensions of the integrated circuit (IC).
Minimum feature size is smallest size of object (e. g. gate length or
interconnect linewidth) on IC.
Minimum feature size of ICs has shrunk considerably over the time of
several decades. As a consequence, the number of transistors has
increased over time.

Constant-voltage scaling

There are two types of scaling, namely constant-voltage scaling and
constant-field scaling. Next, we discuss constant-voltage scaling.
In constant-voltage scaling, only the lateral dimensions of the MOSFET
are scaled. Thus, constant-voltage scaling is a purely geometrical
process.