02-04-2010, 12:03 PM
ABSTRACT:
Micro Electro Mechanical Systems (MEMS) in the field of biomedical industry has given rise to Bio MEMS. These encompasses Biosensors, Bio instruments and tools, Bio testing and analysis etc. Bio MEMS present a great challenge to engineers to design and manufacture of these types of sensors and instruments. Biosensor serves as the interface between living and electronic systems. These systems and the sensors should not affect the behavior of the living systems. Thin “ film microelectronic technology offers special advantages for manufacturing of Biosensors over the traditional manufacturing methods. These can be used in minimizing the deleterious interactions through the use of small size and mass, Bio compatible material, and physical characteristics that are closely related to living tissues. Not only Bio MEMS the finger print sensor also discussed in this paper.
This paper also describes the concept and sensing principle of our fingerprint sensor, which we named as a MEMS finger sensor .Next, the analytical model of the MEMS structures described. Then, a fabrication process to stack the MEMS structures directly on the sensing circuits is presented. In the process, a sealing technique, STP (spin coating film transfer and hot-pressing) is applied. Finally, we discuss the fabrication results and evaluate the sensorâ„¢s ability to obtain fingerprint images regardless of whether the finger is dry or wet.
Micro Electro Mechanical Systems (MEMS) in the field of biomedical industry has given rise to Bio MEMS. These encompasses Biosensors, Bio instruments and tools, Bio testing and analysis etc. Bio MEMS present a great challenge to engineers to design and manufacture of these types of sensors and instruments. Biosensor serves as the interface between living and electronic systems. These systems and the sensors should not affect the behavior of the living systems. Thin “ film microelectronic technology offers special advantages for manufacturing of Biosensors over the traditional manufacturing methods. These can be used in minimizing the deleterious interactions through the use of small size and mass, Bio compatible material, and physical characteristics that are closely related to living tissues. Not only Bio MEMS the finger print sensor also discussed in this paper.
This paper also describes the concept and sensing principle of our fingerprint sensor, which we named as a MEMS finger sensor .Next, the analytical model of the MEMS structures described. Then, a fabrication process to stack the MEMS structures directly on the sensing circuits is presented. In the process, a sealing technique, STP (spin coating film transfer and hot-pressing) is applied. Finally, we discuss the fabrication results and evaluate the sensorâ„¢s ability to obtain fingerprint images regardless of whether the finger is dry or wet.