18-03-2014, 04:39 PM
NANO-ELECTRO-MECHANICAL SYSTEM(NEMS)
ELECTRO-MECHANICAL.ppt (Size: 706.5 KB / Downloads: 47)
INTRODUCTION
Nano-Electro-Mechanical system (NEMS) is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate.
The Nano mechanical components are fabricated using compatible “micromachining” process.
NEMS is the enabling technology allowing the development of smart products.
Nano electro mechanical devices promise to revolutionize measurements of extremely small displacement and extremely weak forces, particularly at the molecular level.
NEMS devices can be so small that hundreds of them can be fit in the same space as one single micro device that performs same function.
BENEFITS OF NANO MACHINES
Nano-Mechanical devices promise to revolutionize measurements of extremely small displacements and forces.
Can built with the masses approaching a few attograms(10-18g) and with the cross section of 10nm.
A second important attribute Nano machines is that they dissipate less energy.
Deposition Process :
One of the basic building blocks in NEMS processing is the ability to deposit thin films of materials.
Thin films of thickness of about few nm to about 100 nm.
Chemical methods used in NEMS deposition process.
Chemical vapour deposition.
Epitaxy.
Alignment :
Inorder to make useful devices the patterns for different lithography steps that belongs to a single structure must be aligned to one another.
The first pattern includes a set of alignment marks.
The first pattern alignment marks used as the reference when positining subsequent patterns.
Nano nozzles:
Another wide deployment of NEMS is their use as nano nozzles that direct the ink in inkjet printers.
They are also used to create miniature robots (nano-robots) as well as nano-tweezers.
NEMS have been rigorously tested in harsh environments for defense and aerospace where they are used as navigational gyroscopes.
SUMMARY
Nano-systems have the enabling capability and potential similar to those of nano-processors .
Since NEMS is a nascent and synergistic technology, many new applications will emerge, expanding the markets beyond that which is currently identified or known.