07-01-2011, 01:20 PM
MEMS.ppt (Size: 716.5 KB / Downloads: 365)
PRESENTED BY:
NISHIYA VIJAYAN
CONTENTS
Introduction
Basic block diagram
1. Micro actuator
2. Micro sensor
Classification
Fabrication
Advantages
applications
INTRODUCTION
Mechatronic s/ms with mechanical and electrical components
Integration of mechanical elements,sensors,actuators&electronic on a common silicon substrate through micro fabrication technology
micro scale dimensions (1mm = 1000 microns)sub micrometer to millimeter
BASIC BLOCK DIAGRAM
i/p signals: signals admitted to the MEMS from various sourses/systems-electrical/mechanical/chemical/optical
MEMs package's chip fabricated by micromachining technique
Consists of microsensors,microactuators&signal
Transduction unit: conditioning the generated signals
MICROACTUATOR
Mechanical device
For controlling or moving something
Converts Electrical signal to physical signals
TRANSDUCTION UNIT:converts i/p power supply to voltage
Driving supply varies depending on applications
MICROSENSOR
Sensor:one form of energy into another and provides the user with a usable energy o/p in response to specific measurable i/p
Used to sense diff.physical parameters like temp,pressure,sound,force,humidity and so on
CLASSIFICATION
Classified by electromagnetic systems and geometry
According to em
1.open ended
2.endless/closed
3.integrated type
According to geometry
Plate,Spherical,Torroidal,conical,cylindrical,
asymmetrical