16-07-2012, 01:22 PM
Silicon IC- Fabrication Technology
Silicon IC- Fabrication .ppt (Size: 253.5 KB / Downloads: 49)
Basic Steps of Si I.C-Fabrication:
Chemical Cleaning of Silicon Wafer
Oxidation
Photolithography
Oxide Etching
Diffusion
Above steps are performed more than once depending on complexity of the I.C being fabricated. Subsequently, following steps are performed to accomplish the I.C fabrication.
6. Thin Film Metal Deposition
7. Photolithography
8. Metal etching
9. Annealing
10.Testing
Fabrication of Silicon P-N Junction Diode
Chemical cleaning of silicon wafer
Oxidation
Photolithography
Silicon oxide etching
Diffusion
Thin film Metal (Aluminium) Deposition
Photolithography
Metal Etching
Semiconductor-Metal contact formation