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APPLICATIONS OF MEMS DEVICES IN NANOSATELLITE


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MEMS

Micro(small)
Electro(electric components/functionality)
Mechanical(mechanical components)
Systems(integrated, system-like functionality)

MEMS fabrication

IC Fabrication
Bulk Micromachining and Wafer Bonding
Micromolding
Surface Micromachining

MEMS Applications:-

Pressure Sensors
Accelerometers
Inertial Sensors
Micro gryoscope

Future Aspect

Future MEMS products will demand higher levels of electrical-mechanical integration and more intimate interaction.
MEMS devices will be made more accurate and with high performance.
Nanoelectromechanical systems (NEMS) will be the next step.