16-02-2011, 12:53 PM
Karthik_soi.ppt (Size: 692.5 KB / Downloads: 259)
Silicon on Insulator
Reasons for SOI
• Replacement for SOS
• Need to extend Moore’s Law
• Commercial Availability of SOI wafers
Advantages of SOI
• Reduced Source and Drain to Substrate Capacitance.
• Absence of Latchup.
• Lower Passive current.
• Denser Layout à Low cost.
SOI Wafer Fabrication
• Bond and Etch Back
• SIMOX (Separation by IMplantation Of oXygen)
• SIMON(Separation by IMplantation Of Nitrogen)
Fully Depleted (FD) SOI
• This is what you expect.
• FDSOI MOSFET
• Depleted channel
Partially Depleted (PD) SOI
• What if active Si layer is thick ?
• Body in channel floating à Floating body effect